Homogenizers

  • ● The LIMO homogenizers can handle a wide range of field geometries and beam shapes - top hat, rectangular, square and lines
  • ● Homogeneity up to the technical limits (up to 1% non-uniformity)
  • ● High NA, high fill factor and retention of polarization
  • ● Optical efficiency up to 90 % help to cut the cost of expensive laser energy
  • ● Manufactured from high-quality materials, e.g., fused silica, CaF2, suitable for many different laser sources (e.g., excimer laser, solid-state laser, diode laser)
  • ● Customized freeform surfaces with highest precision on different wafer sizes (up to 300 mm)

Key Specifications

Product NamePart No. (Double Sided)Part No. (Single Sided)AR Coating Spectrum (nm)Dimensions (L x W x H, mm)Pitch (mm)
DatasheetHomogenizer uncoated, Pitch 1.3 mm, double side structured, 35mm x 35mm;
   
DatasheetCylindrical lens array uncoated, Pitch 1.3 mm, single side structured, 35mm x 35mm
ZLA000743 *ZLA000742 *Uncoated35.0 x 35.0 x 2.01.3
ZLA000745 *ZLA000744 *Uncoated35.0 x 35.0 x 2.01.3
ZLA000781ZLA001688 *Uncoated35.0 x 35.0 x 2.01.3
ZLA001687 *ZLA000772Uncoated35.0 x 35.0 x 2.01.3
ZLA000788 *ZLA001689 *Uncoated35.0 x 35.0 x 2.01.3
ZLA000787 *ZLA001101 *Uncoated35.0 x 35.0 x 2.01.3
ZLA000794 *ZLA000791 *Uncoated35.0 x 35.0 x 2.01.3
ZLA000800 *ZLA000796 *Uncoated35.0 x 35.0 x 2.01.3
ZLA000218 *ZLA001102 *Uncoated35.0 x 35.0 x 2.01.3
DatasheetHomogenizer uncoated, Pitch 0.8 mm, double side structured, 20mm x 20mm
   
DatasheetCylindrical lens array uncoated, Pitch 0.8 mm, single side structured, 20mm x 20mm
ZLA000486 *ZLA001103 *Uncoated20.0 x 20.0 x 2.00.8
ZLA000488 *ZLA000487 *Uncoated20.0 x 20.0 x 2.00.8
ZLA000507ZLA001104Uncoated20.0 x 20.0 x 2.00.8
ZLA000243 *ZLA001105 *Uncoated20.0 x 20.0 x 2.00.8
ZLA000509 *ZLA001106 *Uncoated20.0 x 20.0 x 2.00.8
ZLA000511 *ZLA001107 *Uncoated20.0 x 20.0 x 2.00.8
ZLA000229 *ZLA001108 *Uncoated20.0 x 20.0 x 2.00.8
ZLA000230 *ZLA001109Uncoated20.0 x 20.0 x 2.00.8
DatasheetHomogenizer uncoated, Pitch 0.5 mm, double side structured, 12mm x 12mm;
   
DatasheetCylindrical lens array uncoated, Pitch 0.5 mm, single side structured, 12mm x 12mm
ZLA000237 *ZLA001110 *Uncoated12.0 x 12.0 x 2.00.5
ZLA000234 *ZLA000601 *Uncoated12.0 x 12.0 x 2.00.5
ZLA000238 *ZLA000479Uncoated12.0 x 12.0 x 2.00.5
ZLA000240 *ZLA000239Uncoated12.0 x 12.0 x 2.00.5
ZLA000481ZLA000233 *Uncoated12.0 x 12.0 x 2.00.5
ZLA000485 *ZLA001111 *Uncoated12.0 x 12.0 x 2.00.5


* Example for customization — design and dimensions on request. Longer lead time may apply to custom products.


Applications