Homogenizers
Homogenizers can handle a wide range of field geometries and beam shapes - top hat, rectangular, square and lines - typical full angle from 0.20 to 11.21 deg
Homogeneity up to the technical limits (up to 1% non-uniformity)
High NA, high fill factor and retention of polarization
Optical efficiency up to 90 % help to cut the cost of expensive laser energy
Manufactured from high-quality materials, e.g., fused silica, CaF2, suitable for many different laser sources (e.g., excimer laser, solid-state laser, diode laser)
Customized freeform surfaces with highest precision on different wafer sizes (up to 300 mm)