Home Products Technical Services Shack-Hartmann Arrays

Shack-Hartmann Arrays

2D Microlens arrays

Highest quality and precision

Material: Fused silica, silicon

Wavelength range: DUV (193nm) to IR (5μm)

Lens profile: plano-convex, bi-convex, aspheres, spheres

Additional features: alignment marks, pinholes, apertures

Circular and square lens shape

Shack-Hartmann Arrays

Key Specifications

Shack-Hartmann wave front sensors are used to measure the intensity distribution and phase distortion accurately and in real time.

They are widely used in measurement and diagnostic instruments, and in optical systems to compensate for phase distortions.

Microlens arrays for Shack-Hartmann sensors tend to have small lens apertures to provide the high special resolution required for wave front sensing.




Fused silica (various grades) and silicon

Lens Diameter

30 μm to 2.0 mm

F-number (F#)

Typ. F/5 to F/100

Effective front focal length

Typ. 1 to 100 mm

Wavefront error (Surface profile deviation, rms error)

Typ. 10 to 50 nm

Array size

According to customer requirements

AR coating

UV, VIS, NIR – front side, back side, to air, to glue

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