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炬光科技荣获“维科杯”OFweek 2021年度激光行业精密激光设备技术创新奖

    
Time：2021-09-28

  

  

  	
		
	
  

  
  
  
“OFweek2021（第十八届）先进激光技术应用峰会暨“维科杯”年度评选颁奖典礼”于2021年9月24日在深圳福田大中华喜来登酒店召开。西安炬光科技凭借DLight®S系列半导体集成电路晶圆退火系统，一举斩获“维科杯”OFweek 2021年度激光行业精密激光设备技术创新奖。


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炬光科技获奖证书及奖杯


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炬光科技项目经理 华大成（右一）


炬光科技推出的DLight®S系列半导体集成电路晶圆退火系统，结合了产生光子的共晶键合技术、激光光源热管理技术、热应力控制技术以及调控光子的激光光束转换技术和光场匀化技术，可生成一条线宽70μm，长宽比达160:1的近红外波段极窄线光斑，提供高达1800W/mm2的连续能量输出，在光斑长度方向上可达到＞95%的光斑均匀性和＞98%的连续输出能量稳定性，同时还具备工艺点温度监测，输出光束质量在线检测等附加功能。


该产品主要应用于28nm及以下半导体逻辑芯片制造前道工序，通过高能量密度激光照射到晶圆表面，在不到1毫秒的时间内将表层原子层加热到1000℃以上再急速冷却，从而有效减少工序中产生的晶圆电极缺陷，提高产品性能，提升晶圆生产良品率。


DLight®S系列半导体集成电路晶圆退火系统能够完成多种加工工艺，填补了国内相关产品的空白。


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炬光科技DLight®S系列半导体集成电路晶圆退火系统


 


炬光科技将通过技术创新、卓越制造和快速响应，为成为全球可信赖的光子应用解决方案提供商而不断努力。

  
    
  
  

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